E-Beam and Thermal Evaporator with Sputter Target

Joachim Knoch Available Processing Tools, Metallization, Physical Vapor Depostion

Electron-Beam Evaporation, Thermal Evaporation and Sputtering System

CREAVAC

Usage

  • Modus Operandi:
    User-mode
  • Contamination category: C
  • Sample-size:
    Pieces ... 4″
E-Beam Evaporator

FOM-Name and Location

  • FOM-Name:
    E-Beam and Thermal Evaporator
  • Location:
    CMNT, Room 002

Resources

  • Tool manager:
    Natalie Bruger
  • Instruction video:
    Open video
  • Tool description:
    7 x 7 cm3 e-beam evaporator crucibles (8 keV),
    2 thermal evaporators (2 kW),
    1 DC sputter source,
    Ar milling,
    base pressure: 5 x 10-8 mbar,
    load-lock,
    fully rotatable, tiltable (+75°), heatable 200 °C, water-cooled,
    variable working distance: 20...70 cm