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3D Laser Scanning Confocal Microscope
Keyence, VK-X 200
Usage
- Modus Operandi:
User-mode - Contamination category:
A, B, C if appropriate handle wafer is used - Sample-size:
Pieces ... 6″ wafers
FOM-Name and Location
- FOM-Name:
3D Laser Scanning Microscope - Location:
CMNT, Room 001
Resources
- Tool manager:
Birger Berghoff - Instruction video:
Open video - Tool description:
3D Laser Scanning Confocal Microscope,
motorized x-y-z-stage,
optical height/profile measurements,
used to automated search of 2D material flakes,
transfer aparatus for 2D materials
- Modus Operandi:
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Spectroscopic Ellipsometer
Accurion, nanofilm_ep4se
Usage
- Modus Operandi:
User-mode - Contamination category: A,B,C if appropriate carrier wafers are used
- Sample-size:
Pieces ... 4″ wafer
FOM-Name and Location
- FOM-Name:
Ellipsometer - Location:
CMNT, Room 001
Resources
- Tool manager:
Birger Berghoff - Instruction video:
Open video - Tool description:
Mapping is possible (100 mm x 100 mm),
lateral resolution: 1 μm,
spectral range: 360…950 nm
Standard Operation Procedure EP4v2.3,
Mapping EP4v1.1,
Short Manual
- Modus Operandi:
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Profilometer
Bruker, DektakXT
Usage
- Modus Operandi:
User-mode - Contamination category: A, B
- Sample-size:
Pieces ... 4″ wafer
FOM-Name and Location
- FOM-Name:
Profilometer - Location:
CMNT, Room 001
Resources
- Tool manager:
Birger Berghoff - Instruction video:
Open video1,
open video2 - Tool description:
- Modus Operandi:
Back to overview of tools.