Photolithography System (Stepper)

Joachim Knoch Available Processing Tools, Photolithography

Photolithography System (Stepper)

Canon, FPA 3000 i5+

Usage

  • Modus Operandi:
    Service-Mode
  • Contamination category:
    B
  • Sample-size:
    only 6" wafers; no samples

FOM-Name and Location

  • FOM-Name:
    - AMO - Stepper
  • Location:
    AMO

Resources

  • Tool manager:
    AMO
  • Instruction video:
    Not available
  • Tool description:
    6" i-line Stepper with 0.5 μm resolution