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Category: Sputtering

Sputtering System

December 19, 2016December 20, 2016 Joachim Knoch

Nordiko, NS 2550 Duisburg Modus Operandi:Service-ModeContamination category:CSample-size:100 mm, 150 mm Wafer FOM-Name:- Nordiko (Duisburg)Location:ZMNT, Room 007 Tool manager: Jochen HeissInstruction video: Not availableTool description:Targets: Ti, Pl, Iridium, on demand

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Sputtering System

December 19, 2016July 27, 2017 Joachim Knoch

Nordiko, NS 2550 Berlin Modus Operandi:Service-ModeContamination category:CSample-size:100 mm, 150 mm Wafer FOM-Name:- Nordiko (Berlin)Location:ZMNT, Room 007 Tool manager: Jochen Heiss Instruction video: Not available Tool description: Targets: Ti, Au, changing, on demand

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Categories

  • Available Characterization Tools (13)
  • Available Processing Tools (54)
    • Annealing (6)
    • Atomic Layer Deposition (2)
    • Chemical Vapor Deposition (4)
    • Dicing (1)
    • Dry Etching (9)
    • Electron-Beam Lithography (4)
    • Metallization (7)
    • Nanoimprint Lithography (4)
    • Oxidation (2)
    • Photolithography (14)
    • Physical Vapor Depostion (5)
    • Polishing (2)
    • Sputtering (2)
    • Wafer Bonding (2)
    • Wet Chemical Processing (12)
  • Slider Posts (6)

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