Skip to main content
ZMNT – RWTH Aachen Univerity
  • Home
  • Organization
    • Institutes Involved in ZMNT
    • ZMNT Management
    • Contact / How to find us
  • Facility
    • Available Tools
    • Available Processes
    • Contamintation Control
    • Clean-Room Extension
    • Make a Tool-Reservation
  • Get Access
    • Step 1 – FOM account
    • Step 2 – online safety test
    • Step 3 – on-site safety training
    • Step 4 – tool training
  • Publications

Category: Electron-Beam Lithography

Electron-Beam Lithography System

November 4, 2016November 4, 2016 Joachim Knoch

Vistec, EBPG 5200 Modus Operandi:Service-ModeContamination category:B and C (dedicated holder)Sample-size:from samples of 10×10 mm² up to 8″ wafers FOM-Name:- AMO – E-Beam Litho (Vistec EBPG 5200)Location:AMO Tool manager: AMO Instruction video: Not available Tool description: E-Beam lithography tool; 50/100 kV; sub 10 nm resolution

Read More

E-Beam Lithography (eLINE)

June 2, 2016October 11, 2016 Joachim Knoch

RAITH, eLINE Modus Operandi:User-modeContamination category: B, CSample-size:Pieces … 4″ FOM-Name:- Physik – E-Beam Litho (Raith eLINE)Location:Physikzentrum, Room 28A315 Tool manager: Lars Schreiber Instruction video: Open video Tool description: Raith, eLINE

Read More

Wet Benches Solvents, Resists, Developers

May 21, 2016October 11, 2016 Joachim Knoch

Modus Operandi:User-modeContamination category: CSample-size:Pieces … 4″ FOM-Name: – Physik – Wet Benches Location: Physikzentrum, Room 28A313 Tool manager:Natalie BrugerInstruction video:Open videoTool description:Three wet benches for solvents (isopropanol, acetone), resists (incl. spinner and hotplates) and developers.

Read More

Electron-Beam Lithography (RAITH150 Two)

April 26, 2016July 17, 2017 Joachim Knoch

Raith,  RAITH150 Two Modus Operandi:User-modeContamination category: A,B,C if appropriate chucks are usedSample-size:Pieces … 6″ wafers FOM-Name:– IHT – E-Beam Litho (RAITH150 Two)Location:WSH, Room 24B102 Tool manager: Birger Berghoff Instruction video: Tool description:

Read More

Search me:

Categories

  • Available Characterization Tools (13)
  • Available Processing Tools (54)
    • Annealing (6)
    • Atomic Layer Deposition (2)
    • Chemical Vapor Deposition (4)
    • Dicing (1)
    • Dry Etching (9)
    • Electron-Beam Lithography (4)
    • Metallization (7)
    • Nanoimprint Lithography (4)
    • Oxidation (2)
    • Photolithography (14)
    • Physical Vapor Depostion (5)
    • Polishing (2)
    • Sputtering (2)
    • Wafer Bonding (2)
    • Wet Chemical Processing (12)
  • Slider Posts (6)

Quick Links

  • Contact / How to find us
  • Home
  • Members
  • Sitemap
  • Wiki

Collaborators

  • AMO GmbH
  • CDPP
  • Forschungszentrum Jülich
  • Helmholtz Nanoelectronics Facility
  • JARA FIT
sparkling Theme by Colorlib Powered by WordPress