Arias Modus Operandi:User-modeContamination category: A, B, C if appropriate handle wafer and chucks are usedSample-size:Pieces … 6″ wafer FOM-Name:Wet Bench Resist CoatingLocation:CMNT, Room 001 Tool manager: Birger Berghoff Instruction video: Open video Tool description:
Category: Wet Chemical Processing
HF Vapor Phase Etcher
Idonus Sarl, VPE-150 Modus Operandi:User-modeContamination category:A, BSample-size:Pieces … 4″ FOM-Name:HF Vapor Phase EtcherLocation:CMNT, Room 001 Tool manager: Birger Berghoff Instruction video: Tool description: