Oxford Instruments, PlasmaPro 100 Cobra Modus Operandi: User-mode Contamination category: A, B Sample-size: Pieces … 6″ wafers FOM-Name: ALE for Si-based Materials (Oxford Instruments, PlasmaPro100) Location: CMNT, Room 007 Tool manager: Birger Berghoff Instruction video: Open video Tool description: Atomic-layer etching system for Si-based Materials. Available etching processes: Si, SiO2. Available gases: SF6, CH4, CHF3, O2, […]