Idonus Sarl, VPE-150 Modus Operandi:User-modeContamination category:A, BSample-size:Pieces … 4″ FOM-Name:HF Vapor Phase EtcherLocation:CMNT, Room 001 Tool manager: Birger Berghoff Instruction video: Tool description:
Category: Available Processing Tools
DRIE (Cobra)
Oxford Instruments, PlasmaPro 100 Cobra ICP Etch System Modus Operandi:User-modeContamination category: A, BSample-size:Pieces … 4″ wafers,8″ wafers possible with small modifications FOM-Name: ICP-DRIE EtcherLocation: CMNT, Room 006 Tool manager: Birger Berghoff Instruction video: Open video Tool description:
MA_BA6
SÜSS MicroTec, MA/BA6 Modus Operandi:User-modeContamination category: A,B,C if appropriate chuck and masks are usedSample-size:Pieces … 6″ wafer FOM-Name:Optical Lithography (MABA6)Location:CMNT, Room 009 Tool manager: Birger Berghoff Instruction video: Open video Tool description: Top- and back-side alignment