Stylus Profiler

Joachim Knoch Available Characterization Tools

Stylus Profiler

Tencor, P-10

Usage

  • Modus Operandi:
    User-Mode
  • Contamination category:
    C
  • Sample-size:
    100 mm, 150 mm, 200mm Wafer

FOM-Name and Location

  • FOM-Name:
    - Profiler Tencor P-10
  • Location:
    ZMNT, Room 007

Resources

  • Tool manager:
    Jochen Heiss
  • Instruction video:
    Not available
  • Tool description:
    A computerized, highly sensitive surface profiler that measures roughness, waviness, step height, and other surface characteristics in a variety of applications.