Working in the Cleanroom

The Central Laboratory for Micro- and Nanotechnolgy (ZMNT) provides a state-of-the-art microfabrication tool set that allows a great variety of different processes ranging from optical and electron-beam lithography, dry and wet etching, physical and chemical-vapor deposition and thermal processingto exhaustive characterization methods. The clean-room is operated in a way that is strict enough to avoid cross-contamination yet sufficiently flexible to satify the processing needs. Samples fabricated in the ZMNT range from silicon CMOS transistors, devices based on nanowire/nanotubes as well as 2D materials, solar cells, MEMS/NEMS devices to GaN power transistors.