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Profilometer (DektakXT)

April 22, 2016July 17, 2017 Joachim Knoch Available Characterization Tools

Profilometer

Bruker, DektakXT

Usage

  • Modus Operandi:
    User-mode
  • Contamination category: A, B
  • Sample-size:
    Pieces ... 4″ wafer
Bruker DEKTAK XT

FOM-Name and Location

  • FOM-Name:
    Profilometer
  • Location:
    CMNT, Room 001

Resources

  • Tool manager:
    Birger Berghoff
  • Instruction video:
    Open video1,
    open video2
  • Tool description: 

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Plasma Processes
MA_BA6

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