PECVD (Petzi)

Joachim Knoch Available Processing Tools, Chemical Vapor Deposition

Plasma-Enhanced Chemical Vapor Deposition System

Oxford Instruments, PlasmaLab 80 Plus

Usage

  • Modus Operandi:
    ...
  • Contamination category: C
  • Sample-size:
    Pieces ... 4″
Oxford PlasmaLab 80 PECVD

FOM-Name and Location

  • FOM-Name:
    PECVD (Petzi)
  • Location:
    CMNT, Room 004

Resources

  • Tool manager:
    Jan Gruis
  • Instruction video:
    Open video
  • Tool description:
    Oxford Instruments, PlasmaLab 80 Plus
    Parallel-plate PECVD
    Process gases: SiH4, O2, NH3