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Plasma Asher (PP35)

June 2, 2016October 11, 2016 Joachim Knoch Available Processing Tools, Dry Etching

Plasma Asher

Alpha Plasma, PP35

Usage

  • Modus Operandi:
    User-mode
  • Contamination category: C
  • Sample-size:
    Pieces ... 4″
Plasma Asher

FOM-Name and Location

  • FOM-Name:
    - Physik - Plasma Asher
  • Location:
    Physikzentrum, Room 28A313

Resources

  • Tool manager:
    Lars Schreiber
  • Instruction video:
    Open video
  • Tool description:
    Alpha Plasma, PP35

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