SEM 1 (Zeiss Sigma)

Joachim Knoch Available Characterization Tools

Scanning Electron Microscope

Zeiss, Sigma

Usage

  • Modus Operandi:
    User-mode
  • Contamination category: A, B
  • Sample-size:
    Pieces ... 4″
Zeiss Sigma SEM 2

FOM-Name and Location

  • FOM-Name:
    - IHT - SEM (Zeiss Sigma)
  • Location:
    WSH, Room 24B107

Resources

  • Tool manager:
    Birger Berghoff
  • Instruction video:
    Open video
  • Tool description:
    Zeiss, Sigma
    Thermal field-emitter SEM