SCIL UV Nanoimprint Lithography System
SÜSS MicroTec, MA8 Gen3
Usage
- Modus Operandi:
Service-Mode - Contamination category:
B - Sample-size:
2" - 8" wafers
FOM-Name and Location
- FOM-Name:
- AMO - SCIL UV Nanoimprint - Location:
AMO
Resources
- Tool manager:
AMO - Instruction video:
Not available - Tool description:
SCIL 2″-8″ UV-Nanoimprint Lithography