Laser Scanning Microscope

3D Laser Scanning Confocal Microscope

Keyence, VK-X 200


  • Modus Operandi:
  • Contamination category:
    A, B, C if appropriate handle wafer is used
  • Sample-size:
    Pieces ... 6″ wafers
Keyence confocal, digital 3D Laser-Microscope with motorized x-y table

FOM-Name and Location


  • Tool manager:
    Birger Berghoff
  • Instruction video:
    Open video
  • Tool description:
    3D Laser Scanning Confocal Microscope,
    motorized x-y-z-stage,
    optical height/profile measurements,
    used to automated search of 2D material flakes,
    transfer aparatus for 2D materials