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Plasma Asher (Tegal, 915)

April 26, 2016October 11, 2016 Joachim Knoch Available Processing Tools, Dry Etching

Plasma Asher

Tegal, 915

Usage

  • Modus Operandi:
    User-mode
  • Contamination category: B,C (B if appropriate handling wafer is used)
  • Sample-size:
    Pieces ... 6″ wafers
O2 Plasma Asher

FOM-Name and Location

  • FOM-Name:
    N.N.
  • Location:
    CMNT, Room 009

Resources

  • Tool manager:
    Jochen Heiss
  • Instruction video:
    Open video
  • Tool description:
    Tegal, 915

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Wafer Bonder (SB6e)
E-Beam and Thermal Evaporator with Sputter Target

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