Skip to main content
ZMNT – RWTH Aachen Univerity
  • Home
  • Organization
    • Institutes Involved in ZMNT
    • ZMNT Management
    • Contact / How to find us
  • Facility
    • Available Tools
    • Available Processes
    • Contamintation Control
    • Clean-Room Extension
    • Make a Tool-Reservation
  • Get Access
    • Step 1 – FOM account
    • Step 2 – online safety test
    • Step 3 – on-site safety training
    • Step 4 – tool training
  • Publications

CMP

June 2, 2016July 17, 2017 Joachim Knoch Available Processing Tools, Polishing

Chemical-Mechanical Polisher

STRASBAUGH, 6EC

Usage

  • Modus Operandi:
    User-mode
  • Contamination category: A, B (C with dedicated polishing pads)
  • Sample-size:
    4″
Chemical Mechanical Polishing

FOM-Name and Location

  • FOM-Name:
    Chemical-Mechanical Polisher
  • Location:
    CMNT, Room 001

Resources

  • Tool manager:
    Birger Berghoff
  • Instruction video:
    Open video
  • Tool description:
    STRASBAUGH, 6EC

Post navigation

SEM 2 (Zeiss Sigma)
Low- and High-Temp Vac Probe Station

Search me:

Categories

  • Available Characterization Tools (13)
  • Available Processing Tools (54)
    • Annealing (6)
    • Atomic Layer Deposition (2)
    • Chemical Vapor Deposition (4)
    • Dicing (1)
    • Dry Etching (9)
    • Electron-Beam Lithography (4)
    • Metallization (7)
    • Nanoimprint Lithography (4)
    • Oxidation (2)
    • Photolithography (14)
    • Physical Vapor Depostion (5)
    • Polishing (2)
    • Sputtering (2)
    • Wafer Bonding (2)
    • Wet Chemical Processing (12)
  • Slider Posts (6)

Quick Links

  • Contact / How to find us
  • Home
  • Members
  • Sitemap
  • Wiki

Collaborators

  • AMO GmbH
  • CDPP
  • Forschungszentrum Jülich
  • Helmholtz Nanoelectronics Facility
  • JARA FIT
sparkling Theme by Colorlib Powered by WordPress