SÜSS MicroTec, MJB3 Modus Operandi:User-modeContamination category: B, CSample-size:Pieces … 3″ FOM-Name:- Physik – Photolithography System (MJB3)Location:Physikzentrum, Room 28A313 Tool manager: Arne Hollmann Instruction video: Open video Tool description: SÜSS MicroTec, MJB3
Category: Available Processing Tools
Plasma Asher (PP35)
Alpha Plasma, PP35 Modus Operandi:User-modeContamination category: CSample-size:Pieces … 4″ FOM-Name:- Physik – Plasma AsherLocation:Physikzentrum, Room 28A313 Tool manager: Lars Schreiber Instruction video: Open video Tool description: Alpha Plasma, PP35
E-Beam Lithography (eLINE)
RAITH, eLINE Modus Operandi:User-modeContamination category: B, CSample-size:Pieces … 4″ FOM-Name:- Physik – E-Beam Litho (Raith eLINE)Location:Physikzentrum, Room 28A315 Tool manager: Lars Schreiber Instruction video: Open video Tool description: Raith, eLINE
PECVD (Petzi)
Oxford Instruments, PlasmaLab 80 Plus Modus Operandi: …Contamination category: CSample-size:Pieces … 4″ FOM-Name:PECVD (Petzi)Location:CMNT, Room 004 Tool manager: Jan Gruis Instruction video: Open video Tool description: Oxford Instruments, PlasmaLab 80 Plus Parallel-plate PECVD Process gases: SiH4, O2, NH3
IQE Measurements (PV Tools)
PV Tools, IQE-SCAN Modus Operandi:User-modeContamination category: A, B, CSample-size:Pieces and 6″ solar cells FOM-Name:- IHT – IQE MeasurementsLocation:WSH, Room 24B116 Tool manager: Birger Berghoff Instruction video: Open video Tool description: PV Tools, IQE-SCAN
Annealer (Self-built)
Self-built Modus Operandi:User-modeContamination category: CSample-size:Pieces FOM-Name:- Physik – AnnealerLocation:Physikzentrum, Room 28A313 Tool manager:Natalie BrugerInstruction video:Open videoTool description: Self-built annealer
Wet Benches Solvents, Resists, Developers
Modus Operandi:User-modeContamination category: CSample-size:Pieces … 4″ FOM-Name: – Physik – Wet Benches Location: Physikzentrum, Room 28A313 Tool manager:Natalie BrugerInstruction video:Open videoTool description:Three wet benches for solvents (isopropanol, acetone), resists (incl. spinner and hotplates) and developers.
E-Beam and Thermal Evaporator with Sputter Target
CREAVAC Modus Operandi:User-modeContamination category: CSample-size:Pieces … 4″ FOM-Name:E-Beam and Thermal EvaporatorLocation:CMNT, Room 002 Tool manager: Natalie BrugerInstruction video: Open videoTool description: 7 x 7 cm3 e-beam evaporator crucibles (8 keV), 2 thermal evaporators (2 kW), 1 DC sputter source,Ar milling, base pressure: 5 x 10-8 mbar, load-lock, fully rotatable, tiltable (+75°), heatable 200 °C, water-cooled, variable working distance: 20…70 cm
Plasma Asher (Tegal, 915)
Tegal, 915 Modus Operandi:User-modeContamination category: B,C (B if appropriate handling wafer is used)Sample-size:Pieces … 6″ wafers FOM-Name:N.N.Location:CMNT, Room 009 Tool manager: Jochen Heiss Instruction video: Open video Tool description: Tegal, 915
Wafer Bonder (SB6e)
SÜSS MicroTec, SB6e Modus Operandi:User-modeContamination category: B,C if appropriate handling tools are usedSample-size:6″ wafers FOM-Name:N.N.Location:CMNT, Room 006 Tool manager: Jochen Heiss Instruction video: Open video Tool description: SÜSS MicroTec, SB6e